Materials emissions testing in the semiconductor and associated industries
Application Note 062
Airborne molecular contamination is a serious issue in the semiconductor industry as the presence of volatile and semi-volatile organic vapours adversely affects the growth and performance of silicon wafers, which in turn affects the performance of microprocessors, data storage devices and other key electronic components.
This application note demonstrates that thermal desorption is an ideal technique for measuring the range of components outgassed by both cleanroom/fabrication facilities and by electronic components themselves.
